CMS300 MEMS Combi-Sensor
The CMS series of MEMS sensors combines a single axis gyro, dual-axis low-g accelerometer, and dedicated control ASIC to deliver angular rate and linear acceleration measurements with class-leading bias and noise over temperature. Enclosed in a hermetically-sealed ceramic LCC surface mount package, the sensors are available in two versions, one that can be mounted flat to a board and an orthogonal version that can be mounted on its side.
The sensors feature user-selectable dynamic range and bandwidth. Sensor measurements, built-in test status and device temperature are all output via a digital SPI interface. Each individual unit is calibrated over the full rated temperature range.
| CMS300 (Flat) | CMS390 (Orthogonal) | |
| Dimensions | 10.4 x 6.0 x 2.18 mm | 10.4 x 6.7 x 2.7 mm |
| Weight | 0.4g | 0.6g |
| User-Selectable Ranges | Gyro: ±150˚/s, ±300˚/s Accelerometer: ±2.5g, ±10g |
Gyro: ±150˚/s, ±300˚/s Accelerometer: ±2.5g, ±10g |
| User-Selectable Bandwidth | Gyro: 45Hz, 55Hz, 90Hz, 110Hz Accelerometer: 45Hz, 62Hz, 95Hz, 190Hz |
Gyro: 45Hz, 55Hz, 90Hz, 110Hz Accelerometer: 45Hz, 62Hz, 95Hz, 190Hz |
| Bias over Temperature | Gyro: ±0.092˚/s Accelerometer: ±10mg (2.5g), ±25mg (10g) |
Gyro: ±0.092˚/s Accelerometer: ±10mg (2.5g), ±25mg (10g) |
| Noise | Gyro: 0.06˚/s Accelerometer: 1mg |
Gyro: 0.06˚/s Accelerometer: 1mg |
